Lithographically Defined SU-8 Membranes ID: 2015-075

An innovative manufacturing process for epoxy-based membranes with precisely defined porosity characteristics.

Technology Overview

This technology outlines the creation of epoxy-based membranes using lithography, featuring two distinct layers: a porous membrane layer and a supportive grid layer. The membrane layer possesses holes with diameters between 5-10 micrometers, achieving an open area of around 50%, while the support layer is designed with 30-micrometer wide ribs spaced 130 micrometers apart, resulting in a 25% open area. These membranes can be produced in sheets up to 4 inches in diameter, leveraging established lithographic techniques for scalability.

Key Advantages

• High precision in pore size and distribution, enabling tailored filtration properties
• Scalable production process compatible with existing lithographic techniques
• Optimal balance between strength and porosity due to the unique two-layer design
• Capability to manufacture large sheets up to 4 inches in diameter

Problems Addressed

• Limitations in the customization of membrane pore sizes and total open areas
• Challenges in scaling up the production of precisely defined membranes
• Difficulty in achieving a balance between membrane porosity and structural integrity

Additional Information

Technology ID: 2015-075
Sell Sheet: Download the Sell Sheet here
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Date Published: 28 March, 2025